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![PDF] Low temperature Pyrex/silicon wafer bonding via a single intermediate parylene layer | Semantic Scholar](https://d3i71xaburhd42.cloudfront.net/f7c4f3c953df66d6f3dfca4eb449feccc5791d55/2-Figure1-1.png "PDF] Low temperature Pyrex/silicon wafer bonding via a single intermediate parylene layer | Semantic Scholar")